Wafer heating plate, electrostatic chuck, semiconductor equipment special Mr. Zhou 13501965312

The company relies on the R&D platform of the National Key Laboratory of Welding of Harbin Institute of Technology to transform scientific research achievements. He and the professor of Harbin Institute of Technology were the first to propose the use of vacuum diffusion welding technology in the manufacture of electrostatic chuck base in China.

Vacuum diffusion welding technology is used in the manufacture of electronic countermeasures parts for fighter jets in China. Electronic countermeasures are high-power heat dissipation components, and the design requires small and dense flow channels to increase the heat exchange area, and ordinary vacuum brazing is easy to cause flow channel blockage. The laboratory team of Harbin Institute of Technology adopts the international advanced vacuum diffusion welding technology to effectively solve the problems of flow channel blockage and electrochemical corrosion.

There are few similar products in China, which are monopolized by companies such as United States and Japan, and can form an advantage in price after localization. Compared with the commonly used brazing process, the diffusion welding process has obvious advantages in yield, corrosion resistance and durability.

The main innovations are as follows:

1-For the first time in China, diffusion welding was proposed to be applied to the manufacture of electrostatic chucks, and the relevant mechanical properties, air tightness properties, flow resistance properties, fatigue properties, and cleanliness performance tests were first completed;

2-Form a complete set of manufacturing processes and control points, including blank preparation, surface treatment, cavity deformation control, etc., which are successfully used in manufacturing;

3-Ultra-clean welding forming, and the pre-pressure process route to break the aluminum alloy oxide film;

4-Through a series of scientific research tests, research and development of magnesium chip transition medium, applied to product manufacturing, greatly improve the quality of welding.

MR zhou 13501965312